Title:
CLEANING TAPE FOR PRECISION POLISH
Document Type and Number:
Japanese Patent JP2005319572
Kind Code:
A
Abstract:
To provide a cleaning tape for use in precision polish, which does not cause scratches on the surface of a solid body and can efficiently remove a foreign object stuck on the surface of the solid body.
The cleaning tape consists of a fiber material layer having a protruded filament loop on the one surface, an abrasive material layer coated on the filament loop, and a film layer attached on the other surface of the fiber material layer.
Inventors:
KIM SEIUN
SHIN TOSHOKU
SHIN TOSHOKU
Application Number:
JP2004233331A
Publication Date:
November 17, 2005
Filing Date:
August 10, 2004
Export Citation:
Assignee:
SUNTEK IND LTD
International Classes:
B24D11/00; B08B11/00; B08B11/04; B24D3/00; (IPC1-7): B24D11/00; B24D3/00
Attorney, Agent or Firm:
Takehiko Suzue
Satoshi Kono
Makoto Nakamura
Kurata Masatoshi
Takashi Mine
Yoshihiro Fukuhara
Sadao Muramatsu
Ryo Hashimoto
Satoshi Kono
Makoto Nakamura
Kurata Masatoshi
Takashi Mine
Yoshihiro Fukuhara
Sadao Muramatsu
Ryo Hashimoto
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