To improve uniformity of a drying speed in a liquid material discharged from a plurality of outlet ports.
Each of two bellows expanding members 31 is mounted at both sides in the main scanning direction of a coating head 14. Further in the coating head 14, a plurality of outlet ports 171 are arranged at equal pitches in a sub-scanning direction normal to the main scanning direction to discharge an organic EL liquid onto a substrate 9. In an coating apparatus 1, the expanding member 31 expands at a rear space in the forward direction of the coating head 14 to feed air into the space, by moving the coating head 14 in the main scanning direction by means of a head-transferring mechanism 15; and an air flow is generated to agitate an atmosphere around the organic EL liquid directly after it is discharged onto the substrate 9. Consequently, the concentration of a solvent component in the organic EL liquid is uniformized at the atmosphere around the organic EL liquid discharged from a plurality of outlet ports 171, to improve uniformity of the drying speed in the organic EL liquid.
OSE HIROKAZU
UENO MASATOSHI
NISHIMUTA HIROSHI
YASUFUKU KOJI
TAKAMURA YUKIHIRO
MATSUKA TAKESHI
