To provide a coating apparatus which can apply a treatment solution only to the rear face of a substrate even in the case the substrate is slantingly transported and is capable of reliably separating the treatment solution and an adhesion prevention solution and separately recovering the solutions.
A treatment solution discharge pipe 30 is for discharging a treatment solution toward the surface of a coating roller 20 from an upstream side of a substrate 100 in the direction of transportation by a transportation roller 10 and under the substrate 100. A treatment solution guiding member 70 for guiding a treatment solution discharged out of the treatment solution discharge pipe 30 to the treatment solution recovery part 45 is attached to a treatment solution recovery part 45.
YAMASHITA EIJI
YAMAOKA HIDETO
| JP2000109216A | 2000-04-18 | |||
| JPH06238213A | 1994-08-30 | |||
| JP2002244467A | 2002-08-30 | |||
| JPH0322566U | 1991-03-08 | |||
| JPH0687338U | 1994-12-22 |
Sachiko Muraguchi