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Title:
COLD TRAP DEVICE
Document Type and Number:
Japanese Patent JPS52114897
Kind Code:
A
Abstract:

PURPOSE: A cold trap device without any heat shield necessity but with improved impurity collecting efficiency and easy operating management.


Inventors:
AMADA TATSUO
KONDOU RIYOUICHI
FUNAFU MASAICHIROU
Application Number:
JP3126276A
Publication Date:
September 27, 1977
Filing Date:
March 24, 1976
Export Citation:
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Assignee:
HITACHI LTD
HITACHI SERVICE ENG
International Classes:
C22B26/10; C22B9/00; G21C19/30; G21C19/313; G21D1/02; (IPC1-7): C22B9/00; G21C19/30; G21D1/02



 
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