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Title:
複合シート及びその製造方法、並びに、積層体及びその製造方法
Document Type and Number:
Japanese Patent JP7176159
Kind Code:
B2
Abstract:
Provided is a composite sheet including a porous nitride sintered body having a thickness of less than 2 mm and a resin filled in pores of the nitride sintered body, wherein a filling rate of the resin is 85% by volume or more. Provided is a method for manufacturing a composite sheet including an impregnation step of impregnating pores of a porous nitride sintered body having a thickness of less than 2 mm with a resin composition having a viscosity of 10 to 500 mPa·s to obtain a resin-impregnated body, and a curing step of heating the resin-impregnated body to semi-cure the resin composition filled in the pores.

Inventors:
Hitoshi Minamikata
Mayuko Wakuda
Kaneko Masahide
Shinya Sakaguchi
Tomoya Yamaguchi
Application Number:
JP2022540696A
Publication Date:
November 21, 2022
Filing Date:
September 27, 2021
Export Citation:
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Assignee:
Denka Co., Ltd.
International Classes:
H01L23/373
Domestic Patent References:
JP2019145744A
JP5082760A
Foreign References:
WO2017155110A1
WO2018181606A1
WO2014196496A1
Attorney, Agent or Firm:
Yoshiki Hasegawa
Yoshinori Shimizu
Takeshi Nakatsuka