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Title:
COMPOSITE TYPE CONTINUOUS THIN FILM FORMING APPARATUS
Document Type and Number:
Japanese Patent JPH10319208
Kind Code:
A
Abstract:

To improve workability productivity by forming hard-coating layers, antireflection films and water repellent coating layers on spectacle lenses with a series of devices without exposing process chambers to the atm.

This apparatus is successively provided with hard-coating chambers 45, 47 which form the hard-coating layers on the surfaces of the spectacle lenses 13 under a vacuum atmosphere, an antireflection coating chamber 49 which forms the antireflection film on the surfaces of the spectacle lenses under the vacuum atmosphere and a water repellent coating chamber 53 which forms the water repellent coating layers on the surfaces of the spectacle lenses under the vacuum atmosphere. A substrate holder mounted with the spectacle lenses is transported in the respective chambers described above without exposing the respective chambers to the atm, by which the hard-coating layers, the antireflection films and the water repellent coating layers are successively formed on the surfaces of the spectacle lenses.


Inventors:
KAMURA HITOSHI
YOSHIHARA MASAAKI
KAMIYA HAJIME
MATSUMOTO SHIGEJI
KIKUCHI KAZUO
Application Number:
JP14322497A
Publication Date:
December 04, 1998
Filing Date:
May 16, 1997
Export Citation:
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Assignee:
HOYA CORP
SHINCRON KK
International Classes:
G02C7/02; B29D11/00; C08J7/04; C23C14/08; C23C16/30; C23C28/00; G02B1/10; G02B1/115; G02B1/14; G02B1/18; (IPC1-7): G02B1/10; B29D11/00; C08J7/04; C23C14/08; C23C16/30; C23C28/00; G02C7/02
Attorney, Agent or Firm:
Fumio Usmura