Title:
CONDUCTIVE CORROSION RESISTANT MEMBER AND ITS MANUFACTURING METHOD
Document Type and Number:
Japanese Patent JP2007277067
Kind Code:
A
Abstract:
To provide a conductive corrosion resistant member having both high corrosion resistance and high conductivity to a halogen group corrosive gas and their plasma and to provide its manufacturing method.
The conductive corrosion resistant member is composed of a combined sintered body containing metal yttrium, carbon and yttrium oxide.
COPYRIGHT: (C)2008,JPO&INPIT
Inventors:
HAYASHI SHINTARO
KONISHI MIKIRO
NAGATOMO DAIRO
KONISHI MIKIRO
NAGATOMO DAIRO
Application Number:
JP2006108503A
Publication Date:
October 25, 2007
Filing Date:
April 11, 2006
Export Citation:
Assignee:
SUMITOMO OSAKA CEMENT CO LTD
International Classes:
C04B35/50; H01L21/3065
Domestic Patent References:
| JP2005206402A | 2005-08-04 | |||
| JP2005206402A | 2005-08-04 |
Attorney, Agent or Firm:
Masatake Shiga
Tadashi Takahashi
Takashi Watanabe
Masakazu Aoyama
Suzuki Mitsuyoshi
Kazuya Nishi
Yasuhiko Murayama
Tadashi Takahashi
Takashi Watanabe
Masakazu Aoyama
Suzuki Mitsuyoshi
Kazuya Nishi
Yasuhiko Murayama
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