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Title:
クリーンルームに設置される容器回転型処理装置及び該容器回転型処理装置をクリーンルームに設置した被処理物処理設備
Document Type and Number:
Japanese Patent JP4237539
Kind Code:
B2
Abstract:

To provide a container rotating type treatment apparatus capable of realizing the compactification of the apparatus itself, the space saving of a clean room, the facilitation of maintenance, the facilitation of the maintenance and control of the clean room and the extension of a work region.

This container rotating type treatment apparatus is equipped with a container 1 in which a material to be treated can be charged, adjusting means 2 and 3 capable of adjusting the least one of the temperature and pressure in the container 1, the drive shaft 4 capable of supporting the container 1 to rotationally drive the same and drive means 5 and 6 capable of applying rotational drive force to the drive shaft 4. The container 1 is supported on one end part 4a of the drive shaft 4 only on one side 1a thereof and the adjusting means 2 and 3 are provided on the side of the other end part 4b of the drive shaft 4. An adjusting piping part 42, which is used when at least one of the temperature and pressure in the container 1 is adjusted using the adjusting means 2 and 3, is provided in the drive shaft 4 and the drive means 5 and 6 are provided between the container 1 and the adjusting means 2 and 3.

COPYRIGHT: (C)2005,JPO&NCIPI


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Inventors:
Yamazaki Tadanari
Yuri Handa
Junta Nagata
Application Number:
JP2003124718A
Publication Date:
March 11, 2009
Filing Date:
April 30, 2003
Export Citation:
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Assignee:
Shinko Environmental Solution Co., Ltd.
International Classes:
F26B11/04; B01F29/60
Domestic Patent References:
JP2000167370A
JP2003103253A
JP3138456B2
JP6063131U
JP42018971B1
JP58064122A
JP4087630A
JP3188932A
Attorney, Agent or Firm:
Noboru Fujimoto
Suzuki Katsuto
Seiichi Yakumaru
Hiroaki Nakatani
Minoru Ohnaka