Containing halogen gas supply device - Central Glass Co., Ltd.

Title:

Containing halogen gas supply device

Document Type and Number:

Japanese Patent JP5938847

Kind Code:

B2

Inventors:

Tomonori Umezaki
Akio Yao
Keita Nakahara
Yuta Takeda

Application Number:

JP2011032998A

Publication Date:

June 22, 2016

Filing Date:

February 18, 2011

Export Citation:

Assignee:

Central Glass Co., Ltd.

International Classes:

F17C7/00; F17C13/00

Domestic Patent References:

Foreign References:

US3061039

Attorney, Agent or Firm:

Masahiro Fujii

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