To continuously detect a solid object such as metallic abrasion powder or sand contaminating hydraulic fluid in a hydraulic driving circuit as an impurity so as to diagnose a contaminated condition of the hydraulic fluid.
A flow passage 26 is formed in a microcell 25 made of a transparent glass material, while element mounting holes 27, 28 are clamping formed on the both sides of the flow passage 26. A light emitting element 33 is arranged inside the element mounting hole 27, while a light receiving element 34 is arranged inside the element mounting hole 28. When the hydraulic fluid is passed through the inside of the passage 26 in the microcell 25 at a fixed speed by means of a mini pump 23, a laser beam emitted from the light emitting element 33 is passed through the hydraulic fluid inside the flow passage 26 so as to be received by the light receiving element 34. Then, a detection signal corresponding to the received light amount is outputted from the light receiving element 34 toward a controller 35.
KONO AKIOMI
SUGIYAMA GENROKU
TANAKA SOTARO
YASUDA HAJIME
| JPH0712723A | 1995-01-17 | |||
| JPH10299721A | 1998-11-10 | |||
| JPH02242138A | 1990-09-26 | |||
| JPH01295136A | 1989-11-28 | |||
| JPH10288580A | 1998-10-27 | |||
| JPH05240872A | 1993-09-21 | |||
| JPH0197841A | 1989-04-17 | |||
| JPH07280720A | 1995-10-27 | |||
| JPH11503236A | 1999-03-23 |
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