Title:
CONTAMINATION PREVENTING APPARATUS FOR REMOVING NOXIOUS GAS AND ITS USE
Document Type and Number:
Japanese Patent JPS62152517
Kind Code:
A
Inventors:
MISHIERU BERUTO
JIRUBEERU RAPORUTO
JIRUBEERU RAPORUTO
Application Number:
JP29577286A
Publication Date:
July 07, 1987
Filing Date:
December 13, 1986
Export Citation:
Assignee:
PHILIPS NV
International Classes:
B01D53/46; B01D53/64; F23G7/06; H01L21/205; H01L21/302; H01L21/3065; (IPC1-7): B01D53/34; F23G7/06; H01L21/205; H01L21/302
Attorney, Agent or Firm:
Akihide Sugimura