To provide a novel gas phase decontamination system which can be especially applied to a flow-through or closed-loop system.
A closed-loop, flow-through gas phase decontamination system comprises: a sealable chamber including an inlet port 12 and an outlet port 14; a closed-loop fluid circuit 16 for leading a carrier gas into the chamber, and for providing a passageway to recirculate the gas outside through the chamber, including a first end in fluid connection with the inlet port of the chamber and a second end in fluid connection with the outlet port of the chamber; means 22a and 22b for recirculating the gas through the closed-loop fluid circuit; a vaporizer 18 for delivering decontaminant vapor into the recirculating carrier gas, being in fluid connection with the fluid circuit next to the inlet port; a pressure sensor 54 for sensing the pressure of the carrier gas; and a means for adding or removing the carrier gas from the carrier gas duct, depending on a detected change in the pressure of the carrier gas.
GEIST STEPHEN G
STEEN PAUL A
Takaaki Yasumura
Natsuki Morishita