Title:
CONTINUOUS PROCESSING EQUIPMENT
Document Type and Number:
Japanese Patent JP2022108026
Kind Code:
A
Abstract:
To protect contamination.SOLUTION: Continuous processing equipment performing continuous processing of a base substance in different processing regions is provided, comprising: a chamber in which a plurality of processing regions is set inside a vacuum-exhaustible chamber; moving means that is arranged within the chamber and moves the base substance across the plurality of processing regions; processing means that performs processing of the base substance in the processing regions; whole evacuation means that evacuates the inside of the chamber; individual evacuation means that evacuates an evacuation region adjacent to the processing region; and control means that controls the whole evacuation means, the individual evacuation means and the processing means. The control means performs drive control of the whole evacuation means to evacuate the inside of the chamber up to predetermined pressure before starting processing of the base substance in the processing region, performs drive control of the whole evacuation means to weaken evacuation velocity less than that before starting processing during processing of the base substance in the processing region, and performs drive control of the individual evacuation means to evacuate the evacuation region up to the predetermined pressure.SELECTED DRAWING: Figure 1
Inventors:
TANI NORIAKI
ASARI SHIN
TAKARA AKIHIKO
SUZUKI NOBUTO
ASARI SHIN
TAKARA AKIHIKO
SUZUKI NOBUTO
Application Number:
JP2021002804A
Publication Date:
July 25, 2022
Filing Date:
January 12, 2021
Export Citation:
Assignee:
ULVAC CORP
International Classes:
H01L21/31; C23C16/44; C23C16/455; C23C16/458; C23C16/50; C23C16/52
Attorney, Agent or Firm:
Shu Oikawa
Tomomasa Katsumata
Tomomasa Katsumata