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Title:
CONTINUOUS PROCESSING TYPE TRAP DEVICE
Document Type and Number:
Japanese Patent JP2002206480
Kind Code:
A
Abstract:

To provide a continuous processing type trap device capable of improving trap efficiency, while maintaining conductance required on a vacuum chamber side, and capable of stably processing reproduction of the inline reactive product.

This continuous processing trap device is provided with an air discharge route for discharging air with a vacuum pump 89 from an airtight chamber 81, a nearly cylindrical airtight trap and reproduction container 32 arranged, while striding over a reproduction route arranged adjacent to the air discharge passage, and trap parts 34a and 34b arranged inside of the trap and reproduction container 32 freely switchably of the air discharge route and the reproduction route. A valve element 50, for sealing between the air discharge route and the reproduction route and provided with seal materials 52a and 52b in the peripheral surface thereof to be brought in contact with the inner peripheral surface of the container 32, is arranged on both the sides of the trap parts 34a and 34b, and a function for monitoring whether sealing by the seal materials 52a and 52b normally functions is provided.


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Inventors:
NOMURA NORIHIKO
NOMICHI SHINJI
YANAGISAWA SEIJI
Application Number:
JP2001008325A
Publication Date:
July 26, 2002
Filing Date:
January 16, 2001
Export Citation:
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Assignee:
EBARA CORP
International Classes:
F04B37/16; B01D8/00; C23C16/44; H01L21/00; H01L21/205; H01L21/302; H01L21/3065; (IPC1-7): F04B37/16; C23C16/44; H01L21/205; H01L21/3065
Domestic Patent References:
JPH10266957A1998-10-06
JPH10266962A1998-10-06
JPH11248594A1999-09-17
JPH0714642U1995-03-10
JPS63159797A1988-07-02
JPH10283013A1998-10-23
JPH11271167A1999-10-05
JP2000140609A2000-05-23
JPH0710683U1995-02-14
JPH09113684A1997-05-02
JPH11230352A1999-08-27
JPH11210621A1999-08-03
JPH11182425A1999-07-06
JPH01234567A1989-09-19
Attorney, Agent or Firm:
Isamu Watanabe (1 person outside)



 
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