Title:
制御回路、パルス電源システム及び半導体処理装置
Document Type and Number:
Japanese Patent JP7382507
Kind Code:
B2
Abstract:
A control circuit for outputting a direct current (DC) signal in the form of a pulsed signal includes a switch circuit having a first terminal, a second terminal, a third terminal, a fourth terminal, a first control terminal, and a second control terminal, wherein the first terminal and the second terminal are input terminals of the DC signal, the third terminal and the fourth terminal are output terminals of the pulsed signal, the first control terminal and the second control terminal receive a first signal or a second signal to control outputting the pulsed signal, in response to the first control terminal and the second control terminal receiving the first signal, the third terminal and the fourth terminal output the pulsed signal, and in response to the first control terminal and the second control terminal receiving the second signal, the third terminal and the fourth terminal stop outputting the pulsed signal; and an energy storage circuit having two terminals connected to the first terminal and the second terminal of the switch circuit to store residual electric energy of the switch circuit when the switch circuit does not output the pulsed signal. The control circuit reduces the oscillation the voltage of occurred at the end of each pulse, and improving the accuracy of controlling the plasma energy and density used in the semiconductor processes.
Inventors:
Way, gun
Application Number:
JP2022534686A
Publication Date:
November 16, 2023
Filing Date:
December 17, 2020
Export Citation:
Assignee:
Beijing NAURA Microelectronics Equipment Co.,LTD
International Classes:
H05H1/46
Domestic Patent References:
| JP2018535504A | ||||
| JP2012033409A | ||||
| JP5045996U |
Foreign References:
| CN2896644Y | ||||
| CN110198138A | ||||
| CN101030706A |
Attorney, Agent or Firm:
Mototsugu Morikawa
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