Title:
多変量モデルによる製造工程の制御
Document Type and Number:
Japanese Patent JP2012515984
Kind Code:
A
Abstract:
A method, controller, and system for controlling a manufacturing process (batch-type or continuous-type) with a multivariate model are described. Dependent variable data and manipulated variable data are received. Dependent variable data represents values of uncontrolled process parameters from a plurality of sensors. Manipulated variable data represents controlled or setpoint values of controllable process parameters of a plurality of process tools. A predicted operational value, multivariate statistic, or both are determined based on the received data, and operating parameters of the manufacturing process are determined based on the predicted score, multivariate statistic, or both.
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Inventors:
McLady, Christopher Peter
Waldo, Svante Bjarne
Waldo, Svante Bjarne
Application Number:
JP2011548066A
Publication Date:
July 12, 2012
Filing Date:
January 20, 2010
Export Citation:
Assignee:
MKS Instruments, Incorporated
International Classes:
G05B13/04
Domestic Patent References:
| JPH04266101A | 1992-09-22 |
Attorney, Agent or Firm:
Hidesaku Yamamoto
Takaaki Yasumura
Natsuki Morishita
Takaaki Yasumura
Natsuki Morishita