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Patent Searching and Data


Title:
CONTROLLING METHOD FOR MANUFACTURING EQUIPMENT AND MANUFACTURING CONDITION
Document Type and Number:
Japanese Patent JPH08250384
Kind Code:
A
Abstract:

PURPOSE: To reduce the experimental amount and obtain the optimum processing conditions by obtaining the value of an error evaluation function S(C) and its first order partial differentiation coefficient under initial processing conditions C° through processing experiments and obtaining the second and higher order partial differentiation coefficients under C° by means of a theoretical model, and finding the functional form of S(C) near the minimum conditions Cmin for the second and higher order partial differeatial coefficients.

CONSTITUTION: The processing condition optimizing computer 105 supplies only signals of processing conditions expected to be suitable for a requester's demand at an initial stage, signals of processing conditions obtained by altering one component of vectors expressing the initial processing conditions C° at, and sendonly the predicted optimum processing condition signals to processing condition controlling and setting devices 107, 108, 109. With the use only of quality data of products manufactured under the above processing conditions and data obtained from a process predicting computer 106, the computer 105 predicts the functional form of the error evaluation function S(C) near the minimum conditions Cmin and predicts the optimum process conditions.


Inventors:
IRIE RYOTARO
KUMIHASHI KOSEI
TAKEMURA YOSHIAKI
USHIO JIRO
MARUIZUMI TAKUYA
Application Number:
JP5394195A
Publication Date:
September 27, 1996
Filing Date:
March 14, 1995
Export Citation:
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Assignee:
HITACHI LTD
International Classes:
C23C14/24; C23C16/52; C23F4/00; G05B13/02; G05B23/02; H01L21/00; H01L21/02; H01L21/203; H01L21/205; H01L21/22; H01L21/66; (IPC1-7): H01L21/02; C23C14/24; C23C16/52; C23F4/00; G05B13/02; G05B23/02; H01L21/203; H01L21/205; H01L21/22; H01L21/66
Attorney, Agent or Firm:
Ogawa Katsuo