Title:
CONTROLLING METHOD OF SCANNING TYPE TUNNEL MICROSCOPE/ SCANNING TYPE TUNNEL SPECTRAL APPARATUS
Document Type and Number:
Japanese Patent JPH04319604
Kind Code:
A
Abstract:
PURPOSE:To enable observation of an image of the surface of a sample with high correctness and reliability even when a plurality of substances exist on the surface, in a scanning type tunnel microscope/a scanning type tunnel spectral apparatus. CONSTITUTION:A relative position between the surface of a sample 1 whereon a plurality of substances exist mixedly and a probe 2a which is scanned in the direction of the surface by an XYZ-axes piezoelectric element 2b is subjected to a feedback control by a feedback control circuit 3h with a feedback signal based on a tunnel current between the sample 1 and the probe 2a, and the surface of the sample 1 is observed by a storage oscilloscope 6. Values of signals of two tunnel currents for values of different bias voltages, which are obtained in two sample hold circuits 3b and 3c by holding them at a timing from a timing circuit 3d are passed through a comparator circuit 3e and then passed through a differential circuit 3f in relation with a set value circuit 3g. Thereby feedback signals being appropriate for the substances on the surface of the sample 1 are given to the feedback control circuit 3h and thus the feedback control being appropriate for each substance is conducted.
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Inventors:
YAMAZAKI KENJI
TORII YASUHIRO
TORII YASUHIRO
Application Number:
JP8803991A
Publication Date:
November 10, 1992
Filing Date:
April 19, 1991
Export Citation:
Assignee:
NIPPON TELEGRAPH & TELEPHONE
International Classes:
G01B7/34; G01N37/00; G01Q10/06; G01Q60/10; G01Q60/12; H01J37/28; (IPC1-7): G01B7/34; H01J37/28
Attorney, Agent or Firm:
Fujiya Shiga