To improve the efficiency of the conveying work, and to improve the throughput of the exposing work.

Standard parts 44, 46, and 48 are set at specific positions to conveying positions 20 and 30, and a measurement is carried out by making the positions of the reference parts 44, 46, and 48 to conveying mechanisms 32, 34, 36, and 38, as the reference positions, so as to measure the adequate working positions of the conveying mechanisms 32, 34, 36, and 38 at the conveying positions 20 and 30. After that, when the conveying mechanisms 32, 34, 36, and 38 are hanged, a measurement is carried out by making the positions of the parts 44, 46, and 48 to the conveying mechanisms after the above exchange, as the reference positions, so as to find the difference between the reference position to the conveying mechanism after the change and the reference position to the conveying mechanism before the change. By changing the working position to the conveying mechanism before the change depending on the found difference of the standard position, the adequate working position of the conveying mechanism after the change at the conveying positions 20 and 30 is calculated.