Title:
CONVEYANCE SYSTEM
Document Type and Number:
Japanese Patent JP2023083847
Kind Code:
A
Abstract:
To provide a conveyance system capable of capturing a foreign object having intruded into the inside of a housing, a foreign object falling from a container, a foreign object generated inside the housing, and the like.SOLUTION: A conveyance system 1 for raising/lowering an article between the upper part and the inside of a housing 11 through an opening 11-2 formed on the upper part of the housing 11 comprises: a raising/lowering unit 34 for raising/lowering a container 33 housing the article between the upper part of the housing 11 and the inside of the housing 11; a seating part 12 on which the container 33 lowered to the inside of the housing 11 by the raising/lowering unit 34 is seated; and an adhesive body 13 provided under the seating part 12.SELECTED DRAWING: Figure 3
Inventors:
YAMATO MANAMI
HIYAMA MASAAKI
HIYAMA MASAAKI
Application Number:
JP2021197788A
Publication Date:
June 16, 2023
Filing Date:
December 06, 2021
Export Citation:
Assignee:
DISCO ABRASIVE SYSTEMS LTD
International Classes:
H01L21/677; B08B5/00; B23Q7/00; B23Q11/00; B23Q11/08; H01L21/301
Attorney, Agent or Firm:
Sakai International Patent Office