PURPOSE: To suppress the generation of stray light on exposing by forming a transmission preventing film which prevents the transmission of light of a specified waveband in a boundary region between segment element lenses of a correcting lens.
CONSTITUTION: A segment lens 10 has such structure that a glass material is divided into many segment element lens surfaces 7 and a specified inclination is formed on each lens surface 7. A inclination angle of the lens surface 7 is decided independent of that of other lens surface 7. A transmission preventing film which prevents the transmission of light of a specified waveband, for example, an ultraviolet ray transmission preventing film 11 which prevents the transmission of ultraviolet rays, in a boundary region 8 on the lens surfaces 7. The preventing film 11 is made of a material which reflects or absorbs the waveband of ultraviolet ray, for example, made of a metal film of Al, Pt, or Mo. The segment lens 10 is used as a correcting lens for an exposure optical path used in the manufacture of a semiconductor element, a liquid crystal panel or the like.
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