Title:
CRYOGENIC TEMPERATURE VESSEL
Document Type and Number:
Japanese Patent JPH04250675
Kind Code:
A
Abstract:
PURPOSE:To provide a cryogenic temperature vessel which can stop a refrigerator or generate an alarm by sensing deterioration of performance of the attached refrigerator. CONSTITUTION:Means 10a, 10b for measuring a flow rate or pressure of refrigerant gas at an outlet of a refrigerant vessel 3, and means 11 for sensing an abnormal increase in the measured value, are provided.
Inventors:
INOUE KUNIAKI
Application Number:
JP174991A
Publication Date:
September 07, 1992
Filing Date:
January 10, 1991
Export Citation:
Assignee:
TOSHIBA CORP
International Classes:
H01L39/04; (IPC1-7): H01L39/04
Attorney, Agent or Firm:
Hideaki Togawa