PURPOSE: To improve working efficiency, by providing a means, which heats a sensor of a monitor comprising a crystal oscillator, in the vicinity of a container.
CONSTITUTION: Pressure in a vacuum container is restored. Before the next evaporating process is started, a valve of a cooling water pipe 8 is closed so as to stop cooling water. When a heater 7 is conducted, heat is conducted through a sensor front cover 41 and a crystal holder 10 and reaches a sensor 9. Then the sensor 9 is heated. Moisture and the like, which are adsorbed to minute particles that are attached to the sensor 9 at the previous evaporating process, are quickly removed. At this time, since the heat of the heater 7 is also conducted to a sensor body 42, the temperature is measured by a thermocouple 12. It is desirable that the heating temperature is 150°C or more. After the enough heating, the current conduction to the heater 7 is stopped, valve is opened, the cooling water is flowed through the cooling water pipe 8, and the temperature of the container and the sensor 9 enclosed in the container is decreased.
| JP4392463 | Film thickness measurement method |
| JPS5816507 | 【考案の名称】管体の寸法測定装置 |
SATOU SUSUMU
HATSUTORI TADASHI
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