Title:
Cutting equipment
Document Type and Number:
Japanese Patent JP6294748
Kind Code:
B2
Inventors:
Toshifumi Matsuyama
Application Number:
JP2014089394A
Publication Date:
March 14, 2018
Filing Date:
April 23, 2014
Export Citation:
Assignee:
Disco Co., Ltd.
International Classes:
B24B27/06; B24B47/22; B24B49/12; H01L21/301
Domestic Patent References:
| JP2012169557A | ||||
| JP2011104731A | ||||
| JP2009012127A | ||||
| JP2007081101A |
Attorney, Agent or Firm:
Hiroaki Sakai