Title:
Cutting equipment
Document Type and Number:
Japanese Patent JP6317941
Kind Code:
B2
Abstract:
An objective of the present invention is to promote space saving of an installation space, and efficiently clean a workpiece on a chuck table. A cleaning nozzle means (40) comprises a cutting apparatus (1). The cleaning nozzle means (40) comprises: a main body unit (42) extended in a direction crossing a moving route of the chuck table (3) which maintains a wafer (W); a plurality spray holes (55) formed at regular intervals in the extension direction of the main body unit; an air supply passage (44) extended in the extension direction of the main body unit; a plurality of air branching supply passages (46) directed from the air supply passage to each spray hole; a plurality of mixing rooms (47) to connect each air branching supply passage and each spray hole; and a cleaning liquid supply passage to supply cleaning liquid into each mixing room. Compressed air supplied from each air branching supply passage and the cleaning liquid supplied from the cleaning liquid supply passage are mixed in each mixing room to form dual-fluid cleaning liquid, which is sprayed through the spray holes to form a water curtain (C).
Inventors:
Ueyama Hiromitsu
Application Number:
JP2014022392A
Publication Date:
April 25, 2018
Filing Date:
February 07, 2014
Export Citation:
Assignee:
Disco Co., Ltd.
International Classes:
H01L21/301; B24B27/06; H01L21/304
Domestic Patent References:
| JP200673828A | ||||
| JP2010118644A | ||||
| JP2003168659A |
Foreign References:
| US20080230092 |
Attorney, Agent or Firm:
Hiroyoshi Aoki
Amada Masayuki
Yoshimasa Okada
Toru Kanno
Tsutomu Mizoguchi
Amada Masayuki
Yoshimasa Okada
Toru Kanno
Tsutomu Mizoguchi
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