Title:
切割方法、その切割方法に使用する超音波ワイヤ切割装置及びウェハー製造方法
Document Type and Number:
Japanese Patent JP6511105
Kind Code:
B2
Inventors:
Yellow Agricultural
Chan Shiho
Chen Masanori
Chan Shiho
Chen Masanori
Application Number:
JP2017166567A
Publication Date:
May 15, 2019
Filing Date:
August 31, 2017
Export Citation:
Assignee:
AUO Crystal Corporation
International Classes:
B24B27/06; B24B1/04; H01L21/304
Domestic Patent References:
| JP2010194706A | ||||
| JP3111104A | ||||
| JP9097773A |
Attorney, Agent or Firm:
Patent Business Corporation Unias International Patent Office