Title:
CVD DEVICE
Document Type and Number:
Japanese Patent JPH0620973
Kind Code:
A
Abstract:
PURPOSE: To provide a CVD device capable of removing a sub-product effectively and preventing a break in a vacuum pump or a reduction in the life span.
CONSTITUTION: In a CVD device which is provided with a CVD reaction pipe 1 communicating with a vacuum pump 2 and which is used under lower pressure, between the CVD reaction pipe 1 and the vacuum pump 2, a corona discharging part 3 for charging with a corona discharge a by-product produced within the CVD reaction pipe 1, and an electric capturing part 5 for capturing electrically the by-product charged by the corona discharging part 3 are provided.
Inventors:
SHINOZUKA SHUHEI
KAWAMURA SATOSHI
MATSUMURA MASAO
KAWAMURA SATOSHI
MATSUMURA MASAO
Application Number:
JP20063392A
Publication Date:
January 28, 1994
Filing Date:
July 03, 1992
Export Citation:
Assignee:
EBARA CORP
International Classes:
B01J19/08; C23C16/00; C30B25/14; H01L21/205; C23C16/44; (IPC1-7): H01L21/205; B01J19/08; C23C16/00; C30B25/14
Attorney, Agent or Firm:
Isamu Watanabe (1 person outside)
Next Patent: VAPOR PHASE GROWING METHOD