Title:
CYLINDER INTERFEROMETER
Document Type and Number:
Japanese Patent JP3635543
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To simply and correctly measure/evaluate a cylindrical concaved face without damaging a cylinder specimen by means of a cylinder interferometer using a reflecting mirror which can measure/evaluate the cylindrical concaved face in a noncontact manner in a wide range.
SOLUTION: A cylinder specimen 2 is arranged inclinedly on an optical axis A of a reference lens 16 of a Fizeau interferometer. A focal position of a cylindrical concaved face 2a is shifted in a direction of a predetermined angle θto the optical axis A, where a reflecting face 14a of a plane mirror 14 is positioned. Direction of a normal of the reflecting face 14a is made to agree with the direction of an optical axis B of the cylinder 2. A coherent light reflected at the cylindrical concaved face 2a is converged to the focal position and also reflected by the plane mirror 14 to return to the cylindrical concaved face 2a. The light returning to the cylindrical concaved face 2a is reflected again at the cylindrical concaved face 2a to return in the direction of incidence thereof. Interference fringes are formed by this returning light and a reflected light by a reference face 16a.
Inventors:
Masashi Omura
Application Number:
JP19607395A
Publication Date:
April 06, 2005
Filing Date:
July 07, 1995
Export Citation:
Assignee:
Fujinon Co., Ltd.
International Classes:
G01B9/02; G01B11/24; G01B11/30; (IPC1-7): G01B9/02; G01B11/24
Domestic Patent References:
| JP252209B2 | ||||
| JP5223539A | ||||
| JP6288735A |
Attorney, Agent or Firm:
Hiroshi Kawano
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