Title:
DEBURRING DEVICE
Document Type and Number:
Japanese Patent JP2016036894
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To improve the productivity of a chip.SOLUTION: A deburring device (2) removes burrs (16) formed on a side surface of a chip (15) formed by dividing a package substrate (W) with a cutting blade (14). The deburring device (2) includes: a drum (3) disposed in an inclined manner, having a cylindrical shape, and including a side wall having a mesh structure; and a rotary motor (4) which rotates the drum around a center axis of the drum. The chip is loaded from one end (an inlet (24)) at the upper side of the drum disposed in the inclined manner and the drum is rotated to transport the chip toward the other end (an outlet (25)) of the drum.SELECTED DRAWING: Figure 2
Inventors:
SEKIYA KAZUMA
Application Number:
JP2014163717A
Publication Date:
March 22, 2016
Filing Date:
August 11, 2014
Export Citation:
Assignee:
DISCO ABRASIVE SYSTEMS LTD
International Classes:
B24B31/02; H01L21/301
Domestic Patent References:
| JPH06124928A | 1994-05-06 | |||
| JPS61219564A | 1986-09-29 | |||
| JPS5986951U | 1984-06-12 | |||
| JPH08168952A | 1996-07-02 | |||
| JP2009166166A | 2009-07-30 |
Attorney, Agent or Firm:
Hiroyoshi Aoki
Amada Masayuki
Yoshimasa Okada
Toru Kanno
Tsutomu Mizoguchi
Amada Masayuki
Yoshimasa Okada
Toru Kanno
Tsutomu Mizoguchi
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