To provide a deep ultraviolet laser device which can emit laser light having wavelength range of 198.3 to 198.8 nm, can be mounted on various devices as a light source for lighting, is practical, has its constitution made compact on the whole, and is highly robust.
Laser light having a wavelength of 198.3 to 198.8 nm as sum frequency light of a second fundamental wave and a fourth fundamental wave is generated by a sum frequency generating means by using laser light of 1,064 to 1,065 nm in wavelength output in pulses by a first light sources as a first fundamental wave, a fourth higher harmonic obtained by wavelength-converting the first fundamental wave by a first wavelength converting means as the second fundamental wave, laser light of 1,560 to 1,570 nm in wavelength output in pulses by a second light source as a third fundamental wave, and a second higher harmonic obtained by wavelength-converting the third fundamental wave by a second wavelength converting means as the fourth fundamental wave.
URATA YOSHIHARU
WADA TOMOYUKI
IMAI SHINICHI
ADVANCED MASK INSPECTION TECH
| JP2004086193A | 2004-03-18 | |||
| JP2002258339A | 2002-09-11 | |||
| JP2001083557A | 2001-03-30 | |||
| JPH03292018A | 1991-12-24 |