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Patent Searching and Data


Title:
DEFECT DETECTION APPARATUS, METHOD, AND PROGRAM
Document Type and Number:
Japanese Patent JP2004286708
Kind Code:
A
Abstract:

To detect defects of an object to be inspected having a random texture in an inspection region through the use of a pattern matching method.

In the defect detection apparatus, an object to be inspected having no defects is previously imaged by a CCD camera to acquire a model image. Pixel data in the inspection region in the model image is replaced with a prescribed specific value by a model image modifying means (8) to create a modified model image. The image is stored in an image memory (10). An object to be inspected is imaged by the CCD camera to acquire an inspection image. An image comparing means (12) compares the acquired inspection image with the modified model image stored in the image memory (10) to detect defects of the object to be inspected.


Inventors:
YAMAMOTO REI
Application Number:
JP2003082286A
Publication Date:
October 14, 2004
Filing Date:
March 25, 2003
Export Citation:
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Assignee:
HITACHI CHEMICAL CO LTD
International Classes:
G01N21/88; G06T1/00; G06T7/00; (IPC1-7): G01N21/88; G06T1/00; G06T7/00
Attorney, Agent or Firm:
Minoru Nakamura
Fumiaki Otsuka
Sadao Kumakura
Shishido Kaichi
Toshio Imajo
Nobuo Ogawa
Village shrine Atsuo
Takaki Nishijima
Atsushi Hakoda
Makoto Watanabe