Title:
DEPOSITION OF FORMING FILM ON OBJECT AND APPARATUS THEREFOR
Document Type and Number:
Japanese Patent JP3417575
Kind Code:
B2
Abstract:
PURPOSE: To make it possible to improve spraying efficiency by reacting a sprayed sample with gas within a glow discharge, depositing the same on a workpiece and executing a deposition treatment in an unstable transition mode.
CONSTITUTION: At least one object is covered with at least one film. The ohmic conductive sample is sprayed in the glow discharge operated by using superimposed DC and AC powder. The sprayed sample is reacted with the gas in the space between the sample and the workpiece and is deposited on the workpiece. The deposition treatment is executed in the unstable transition mode between a metal mode and a reaction mode. The film is so formed as to have the electrical conductivity lower than the electrical conductivity of the stock of the sample. As a result, the execution of the deposition to make the chemical quantity substantially homogenous is made possible.
Inventors:
Eduard Cuegler
Application Number:
JP9250392A
Publication Date:
June 16, 2003
Filing Date:
April 13, 1992
Export Citation:
Assignee:
Unaxis Balzers Akchen Gesell Shaft
International Classes:
C23C14/00; C23C14/34; H01J37/34; (IPC1-7): C23C14/34
Other References:
【文献】欧州特許出願公開416241(EP,A1)
Attorney, Agent or Firm:
Aoki Akira (4 outside)
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