PURPOSE: To provide a voltage signal measuring device for an integrated circuit which can determine the spacing between a probe and a circuit to be measured precisely without damaging the probe and circuit, presents an enhanced reproducibility of measuring, and is capable of precision measurement.
CONSTITUTION: An air guide 6 is moved by a vertical coarse motion mechanism 11 so as to approach a circuit to be measured 1, and a cylinder 5 and accordingly a probe 3, which is supported thereby through a probe holder 4, is approached to the circuit 1. The probe 3 is moved by a piezo actuator 8 toward the circuit 1 and touched therewith with no risk of damaging through the action of a balance mechanism 9, and with the contact point as reference, the probe 3 is separated. Upon determination of the distance generated, the cylinder 5 is fixed by a cylinder lock 12 along with securing of the probe 3, and thereupon the distance between the probe 3 and the circuit measured 1 is determined precisely.
NAGATSUMA TADAO
SATO TATSUO
UCHIYAMA KUNIO
NIKON CORP