Title:
【発明の名称】半導体装置のセル配置方法及びセル配置装置
Document Type and Number:
Japanese Patent JP3055106
Kind Code:
B2
Inventors:
Seiji Nishioka
Application Number:
JP32753490A
Publication Date:
June 26, 2000
Filing Date:
November 28, 1990
Export Citation:
Assignee:
富士通株式会社
富士通ヴィエルエスアイ株式会社
富士通ヴィエルエスアイ株式会社
International Classes:
H01L21/822; H01L21/82; H01L27/04; (IPC1-7): H01L27/04; H01L21/82; H01L21/822
Domestic Patent References:
| JP58116757A | ||||
| JP57117254A | ||||
| JP57111044A | ||||
| JP230164A | ||||
| JP2224371A |
Attorney, Agent or Firm:
Hironobu Onda