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Patent Searching and Data


Title:
DESIGN RULE GENERATION SYSTEM AND RECORDING MEDIUM WHERE THE PROGRAM IS RECORDED
Document Type and Number:
Japanese Patent JP2001014376
Kind Code:
A
Abstract:

To provide a system which has high operation efficiency and shortens the time needed to determine a design rule by automating processes up to the determination of the design rule.

The system is equipped with an L/S pattern automatic generation part 1 which automatically generates an L/S pattern prescribed by line width and space width, an optical simulation part 2 which performs optical simulation according to the L/S pattern, a finish prediction part 3 which predicts the size (finish size) of a pattern formed on resistance according to the result of the optical simulation, an L/S matrix database structuring part 4 which generates an L/S matrix according to the finish prediction result and structures data used for the L/S matrix generation in the form of a database, and a design rule generation part 5 which generates a design rule from the L/S matrix.


Inventors:
TSUKUDA EIJI
Application Number:
JP18904499A
Publication Date:
January 19, 2001
Filing Date:
July 02, 1999
Export Citation:
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Assignee:
MITSUBISHI ELECTRIC CORP
International Classes:
H01L21/027; G03F1/68; G03F1/70; G03F9/00; G06F17/50; G06G7/48; H01L21/00; (IPC1-7): G06F17/50; G03F1/08; H01L21/027
Attorney, Agent or Firm:
Shigeaki Yoshida (2 outside)