Title:
検出装置、検出方法および電子ビーム照射装置
Document Type and Number:
Japanese Patent JP4062956
Kind Code:
B2
Abstract:
A detection apparatus, a detection method and an electron beam irradiation apparatus for detecting deflection electrons in order to precisely focus even if a vacuum seal valve is provided. An electron beam irradiation apparatus including a vacuum seal valve mechanism which is provided in a static pressure floating pad, and opens/closes an electron beam passage with a piston so as to switch between an electron beam irradiation state and a vacuum seal state, and a deflection electron detector which is provided between the vacuum seal valve mechanism and a master disk and detects a deflection electron signal generated from the master disk with electron beam irradiation.
Inventors:
Yoshihisa Miura
Yuichi Aki
Yuichi Aki
Application Number:
JP2002122966A
Publication Date:
March 19, 2008
Filing Date:
April 24, 2002
Export Citation:
Assignee:
ソニー株式会社
International Classes:
G03F7/207; G21K5/04; G03F7/20; G11B7/09; G11B7/26; G11B9/10; H01J37/18; H01J37/301; H01J37/304; H01J37/305; H01L21/027
Domestic Patent References:
| JP2001242300A | ||||
| JP64076657A | ||||
| JP11296916A |
Attorney, Agent or Firm:
Yoshitsuno Kakuda
Hironobu Isoyama
Hidemori Matsukuma
Hironobu Isoyama
Hidemori Matsukuma