Title:
検知方法、検知装置、及び研磨装置
Document Type and Number:
Japanese Patent JP4147675
Kind Code:
B2
Inventors:
Kajiro Ushio
Shinshiro Keishin
Shinshiro Keishin
Application Number:
JP7684299A
Publication Date:
September 10, 2008
Filing Date:
March 19, 1999
Export Citation:
Assignee:
NIKON CORPORATION
International Classes:
G01B11/06; H01L21/304
Domestic Patent References:
| JP6147838A | ||||
| JP9007985A | ||||
| JP61235708A | ||||
| JP2196906A | ||||
| JP62228104A |