Login| Sign Up| Help| Contact|

Patent Searching and Data


Title:
DETECTOR
Document Type and Number:
Japanese Patent JP2012117870
Kind Code:
A
Abstract:

To improve accuracy in focusing.

A high-sensitive line sensor 16B acquires light reception data with high luminance that is obtained from light intensity of a light point image of an object 2 illuminated by means of a laser illumination part 11. A low-sensitive line sensor 16A acquires light reception data of low luminance that is obtained from the light intensity of the light point image of the object 2. A data processing part 17 normally selects the light reception data of high luminance from the high-sensitive line sensor 16B and if a laser light is saturated when the light reception data of high luminance is obtained, selects the light reception data of low luminance. A detection part 18 detects a focusing state of an image of the object 2 based on the light reception data selected by the data processing part 17 so that the focusing state of the image of the object 2 is detected without fail, thereby allowing accuracy in focusing to be improved. The present invention can apply to, for example, a position detector used for a measurement device that measures a cross-sectional shape of an object.


Inventors:
KUBOTA JUNICHI
NAGANUMA YOSHIHIRO
Application Number:
JP2010266353A
Publication Date:
June 21, 2012
Filing Date:
November 30, 2010
Export Citation:
Click for automatic bibliography generation   Help
Assignee:
NIKON CORP
International Classes:
G01B11/00; G01N21/88
Attorney, Agent or Firm:
Yoshio Inamoto
Takashi Nishikawa