Title:
DEVICE FOR GENERATING HIGH PRESSURE AND FINE FLOWRATE
Document Type and Number:
Japanese Patent JPH05172044
Kind Code:
A
Abstract:
PURPOSE: To enable chemicals to be fed in extremely small pulsation state, and reduce manufacture and construction cost.
CONSTITUTION: There is provided a combination body of a bag-like vessel 18 made of an elastic material, and a pressure vessel 16 housing the vessel 18 and capable of resisting internal pressure equal to or above high pressure pump delivery pressure in a main system. Chemicals to be fed are stored in the bag-like vessel 18 and fluid is branched and introduced from a high pressure pump outlet in the main system to the vessel 16 for pressurizing and compressing the bag-like vessel 18.
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Inventors:
NOMURA MITSUGI
Application Number:
JP35393791A
Publication Date:
July 09, 1993
Filing Date:
December 19, 1991
Export Citation:
Assignee:
BABCOCK HITACHI KK
International Classes:
F04B23/00; H01L21/304; (IPC1-7): F04B23/00; H01L21/304
Attorney, Agent or Firm:
Kenjiro Take