Title:
DEVICE FOR MEASURING DISPLACEMENT
Document Type and Number:
Japanese Patent JPH08193810
Kind Code:
A
Abstract:
PURPOSE: To reduce the fluctuation of measuring errors, always maintain the optimum measuring condition, and perform highly accurate measurement.
CONSTITUTION: A laser projecting part 10a for irradiating an object 13 to be measured with laser light and a position detection part 16 for detecting an scattering position of laser light scattered from the object 13 are equipped. A focus point position control mechanism 12 for holding the focus point of laser light on the object 13 is provided between the laser projecting part 10a and the object 13.
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Inventors:
OGASAWARA AKINOBU
Application Number:
JP2115695A
Publication Date:
July 30, 1996
Filing Date:
January 13, 1995
Export Citation:
Assignee:
SERUTETSUKU SYST KK
International Classes:
G01B11/00; G01B11/30; G01C3/06; (IPC1-7): G01B11/00; G01B11/30; G01C3/06
Attorney, Agent or Firm:
Nakamae Fujio
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