To perform temperature controlling for a board which is not affected by a variation of radiating energy radiated from a transmission window, by controlling the temperature of the transmission window with a heating means based upon measured temperatures by plural measuring means.
A radiation thermometer 4b which measures a temperature of a quartz window 3 is provided and the measured temperature of the quartz window 3 is inputted to a controlling part 5. A radiating energy which is radiated from the quartz window 3 is searched, the radiating energy which is radiated from the quartz window 3 is decreased from total energy which should be given to a board 9, and a transmission energy which should be given to the board 9 by a lamp 21 via the quartz window 3 is searched. An electric power is supplied to the lamp 21 to give the transmission energy to the board 9. By the means, the total energy given to the board 9 is not affected by an influence of variation of the radiating energy radiated from the quartz window 3. Also previous heating for a board processing device 1 is not required and an improvement of a through put can be obtained.
YOKOUCHI KENICHI
MASUDA MITSUHIRO
