PURPOSE: To improve the inspecting performance of the inspecting device by setting≥4 divided inspection areas as to an inspection area of an object of inspection and comparing image data of the divided inspection areas.
CONSTITUTION: For example, when a direction mark M is added at a specific position of the object 16 of inspection, a control means 15 recognizes the area where the direction mark M is added and an area where the mark is not added previously and then a couple of divided inspection areas A1 and A2 are set as to both the areas; and more than two couples of areas are further provided in the direction where the direction mark M is added. Consequently, image data Di and Dj regarding ≥4 divided inspection areas A1 - An in total are compared. Therefore, the position of the direction mark M of the object 16 of inspection can be detected with good reproducibility.
HIZUKA TETSUO
ANDO MORITOSHI
