To provide a device and a method for inspecting a circuit board, which can prevent a circuit board from being contaminated by preventing a spark from being generated in a discharge area when the circuit board is inspected, using a discharge phenomenon.
A discharge electrode 53 is arranged opposite a pad part 12a at a specific interval, while covering all pad parts 12a. Consequently, a discharge area DR is formed between the discharge electrode 53 and the pad parts 12a. The rare gas from a rare gas supply part 71 is supplied to a closed space SP, including the discharge area DR to put the discharge area DR in a rare gas atmosphere, so that the oxygen density is zero or is very low. No spark is therefore generated in the discharge area DR, even when discharging is produced in the discharge area DR by giving a potential difference larger than a discharging start voltage between a wire 12 for inspecting a work (circuit board) 10 and the discharge area 53.
NOGUCHI HIROSHI
NAKAHARA MASAYUKI
OGATA HIKARI
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