Title:
DEVICE AND METHOD FOR LOADING CONDUCTIVE BALL
Document Type and Number:
Japanese Patent JP3402193
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To realize conductive ball loading device and method capable of highly accurately detecting the existence of a conductive balls.
SOLUTION: At the time of a conductive ball existence inspection in a conductive ball loading process for sucking conductive balls by a suction head and loading the sucking balls on a work, the head is relatively horizontally moved from a light-proof type optical sensor 43 to acquire waveform data 62 which indicate a change in the degree of light-proofing. The peak value data of a reference waveform obtained, when the head normally sucks conductive balls are compared with the peak value data of a waveform obtained at the time of practically loading conductive balls for detecting the existence of conductive balls excessively stuck to the work. Consequently, an error in the degree of light-proofing due to the inclination of the suction head or the working errors of suction holes can be removed and the existence of conductive balls can be highly accurately detected.
Inventors:
Rinshi Eguchi
Application Number:
JP12570298A
Publication Date:
April 28, 2003
Filing Date:
May 08, 1998
Export Citation:
Assignee:
Matsushita Electric Industrial Co., Ltd
International Classes:
B23P19/00; B23P21/00; H01L21/50; H01L21/60; H01L23/12; H05K3/34; (IPC1-7): H01L21/60; B23P19/00; B23P21/00; H05K3/34
Domestic Patent References:
| JP9246422A | ||||
| JP9223713A | ||||
| JP897218A | ||||
| JP8206825A |
Attorney, Agent or Firm:
Fumio Iwahashi (2 others)