Title:
DEVICE AND METHOD FOR MEASURING IMPEDANCE
Document Type and Number:
Japanese Patent JP2015117971
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To enhance resistance measurement accuracy of microscopic resistors.SOLUTION: A control unit, with a first probe, second probe, third probe, and fourth probe electrically connected to each other, computes correction impedance at a plurality of measurement signal frequencies using a digital current signal and digital voltage signal and then, with the first and third probes electrically connected to one terminal of an object under measurement and the second and fourth probes electrically connected to the other terminal of the object under measurement, computes impedance of the object under measurement at the plurality of measurement signal frequencies using the digital current signal and digital voltage signal. The control unit then corrects the impedance of the object under measurement obtained at each measurement signal frequency using the correction impedance corresponding to the respective frequency.
Inventors:
KATO HIROYUKI
KITAMORI TETSUJI
HARUKI AKINORI
KITAMORI TETSUJI
HARUKI AKINORI
Application Number:
JP2013260473A
Publication Date:
June 25, 2015
Filing Date:
December 17, 2013
Export Citation:
Assignee:
SHINDENGEN ELECTRIC MFG
International Classes:
G01R27/02; G01R35/00
Domestic Patent References:
| JP2005274561A | 2005-10-06 | |||
| JP2004061372A | 2004-02-26 | |||
| JP2011149750A | 2011-08-04 | |||
| JP2013024793A | 2013-02-04 | |||
| JP2008215898A | 2008-09-18 | |||
| JPS5312191A | 1978-02-03 | |||
| JP2007333494A | 2007-12-27 | |||
| JPS62204166A | 1987-09-08 | |||
| JP2004317195A | 2004-11-11 | |||
| JP2015105928A | 2015-06-08 |
Other References:
“AGILENT TECHNOLOGIES インピーダンス測定ハンドブック”, vol. 2003年11月版, JPN6017042789, 31 October 2003 (2003-10-31), pages 4 - 1, ISSN: 0003678107
Attorney, Agent or Firm:
Tomoya Deguchi
Hirohito Katsunuma
Hirohito Katsunuma