To provide an object transporting device and an object transporting method capable of preventing a trouble caused by a collision upon transporting.
The object transporting device retains a material of the object of transportation or a wafer holder 4 by a retaining unit 15 to transport the same to an objective position between a chip supplying unit 1 and a magazine 9. The retaining unit 15 for chucking the wafer holder 4 is connected to the rod 17a of an air cylinder 17 through an arm 16 while the air cylinder 17 is attached to a bracket 14 moved by a moving means 11. When the wafer holder 4 is collided against a foreign matter upon the transporting operation, a shock upon the collision is mitigated by moving the retaining unit 15 to the separating direction from an objective position, so that the rod 17a is moved into the projecting or immersing direction while the collision is detected by a cylinder operation detecting sensor 18 equipped to the air cylinder 17 and the transporting operation is stopped.
Tomoyasu Sakaguchi
Hiroki Naito
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