To improve accuracy and efficiency in treating (for example, cleaning) the surface of a substrate.
In a conveyance route for the substrate 10, a water tank 15 that stores pure water is located in the lower of a lamp house 12 is provided with a dielectric barrier discharge lamp 1. An atmosphere of a mixed fluid of nitrogen gas and water vapor is produced in the lower position of the lamp house 12, by immersing and placing a nitrogen gas supplying pipe 19 with an outlet which consists of numerous micropores opened in the circumferential shank of the pipe 1 inside the water tank 15 to generate bubbles of the nitrogen gas therein. A reducing active specie [H.] and an oxidizing active specie [.OH] are generated, by decomposing water vapor through the agency of ultraviolet light irradiated from the discharge lamp 1, whereby the surface of the substrate 10 is cleaned dry, and contact angle is reduced.
WADA NORIYA
KENMORI KAZUHIKO
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