To detect abnormality which occurs in an important process formed of a plurality of processors at an early stage and to remove a factor of a device result in a manufacturing process.

A device state discrimination system of the manufacturing process where a plurality of processors are arranged in the same process is provided with a difference information generation means 4 formed of comparators 41, 42 and 43 generating difference information on measurement signals 11, 21 and 31 outputted from the respective processors 1, 2 and 3, and a state discrimination means 5 formed of logic circuits 51, 52 and 53 discriminating the states of the processors 1, 2 and 3 by synthetically determining plural pieces of difference information generated in the difference information generation means 4. Thus, the abnormal device can correctly be specified at the early stage.