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Title:
DEVICE FOR TREATING ARTICLES
Document Type and Number:
Japanese Patent JPS51140849
Kind Code:
A
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Inventors:
KIYONO SEIICHI
TAGUCHI HIDEO
YOKOKURA KOUJI
Application Number:
JP6419175A
Publication Date:
December 04, 1976
Filing Date:
May 30, 1975
Export Citation:
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Assignee:
HITACHI LTD
International Classes:
C23F1/08; B65G49/00; H01L21/302; H01L21/306; H01L21/461; (IPC1-7): B65G49/00; C23F1/08; H01L21/302; H01L21/461



 
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