PURPOSE: To perform automatic and continuous wrapping and, improve the reliability of products by arranging a wafer carried by a loader mechanism from a carrier is converted into a front-tilting position; a tiling angle changing mechanism which is slides a wafer under its own weight; and a glassine bag at the falling point of the wafer.
CONSTITUTION: Wafers 10 in a carrier 1 are sent out one by one by the stepdown of the carrier, are carried by a wafer loader 9 and stop on a angle changing drum 16 of a tilting angle change mechanism 3. When a wafer 10 is detected, it is sucked onto the drum 16 surface through a vacuum hole 23. Then the angle changing drum 16 rotates forward by 60° so that the wafer stops with its front tilted and at the same time vacuum is canceled. The wafer 10 begins to drop along a rail 20 only under its own weight and reaches in a glassine bag 8. A glassine bag hold mechanism 6 moves to the right by one half to wait for the next wafer, and when the wafer has dropped completely, it further moves to the right. When it reaches a storage box, a solenoid for vacuum is unlocked to release the glassine bag 8.